ZHANG Ji-cheng,ZHANG Jian-rong.Study on the Successive Ion Layer Adsorption Reaction by using Spin Coating Method Instead of Pulling the Adsorption Reaction of CdS Films Prepared by the Process[J].Journal of Chengdu University of Information Technology,2016,(06):569-574.
利用旋涂方式代替提拉方式的连续离子层 吸附反应法制备CdS薄膜工艺研究
- Title:
- Study on the Successive Ion Layer Adsorption Reaction by using Spin Coating Method Instead of Pulling the Adsorption Reaction of CdS Films Prepared by the Process
- 文章编号:
- 2096-1618 (2016)06-0569-06
- Keywords:
- materials physics and chemistry; optoelectronic materials; SILAR; improving; thin film; relationship; curve
- 分类号:
- TN304.055
- 文献标志码:
- A
- 摘要:
- 针对连续离子层吸附反应法的吸附不足工艺问题进行改进。采用旋凃方式代替提拉方式的连续离子层吸附反 应法研究改进后的连续离子层吸附反应法工艺条件对薄膜附着性能的影响,并且研究吸附过程中镀膜次数、镀膜时 间、反应物的浓度对薄膜生长过程的影响。运用X射线衍射仪(XRD)对薄膜的晶相组成进行分析表征。对改进后的 方法所制备薄膜的层数和晶粒大小的关系曲线进行分析。结果表明改进后的连续离子层吸附反应法在镀膜层数为 25～30层能有效制备出XRD峰值较好、晶粒较大的CdS薄膜。
- Abstract:
- Aim at the adsorption deficiency of successive ionic layer absorption and reaction(SILAR) method, we made the process improvement. The paper study on the successive ion layer adsorption reaction by using spin coating method instead of pulling the adsorption reaction and researching improved SILAR method of process conditions on the properties of film adhesion, and studied the adsorption process of coating, coating time, concentration of reactants on the influence of thin film growth process. Using XRD analysis of thin film crystal phase composition.The relationship between the number of layers and the grain size of the films prepared by the improved method was analyzed. The results show that the CdS film with better XRD peak value and larger grain size can be produced by the improved continuous ion layer adsorption reaction method in the paper.
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备注/Memo
收稿日期:2016-10-20